Corley W. Strunk, Paul J. Sides
This study addresses the critical challenge of measuring linear nanometric distances, specifically the height of magnetic transducer heads above a rotating glass disk, utilizing scattered total internal reflection of visible light. The objective was to develop an innovative calibration method that improves measurement accuracy to as small as 10 nm. The methodology employed combines the second derivative of the transmittance of scattered light with parameter fitting, creating a robust calibration process. Results demonstrated that the measurements achieved a precision agreement of 1 nm when compared against an industry-standard three-color interferometer, even at the lowest values measured. Notably, the technique remains reliable down to a height of 10 nm, making it particularly advantageous for practical applications in the field. This advancement represents a significant step forward in the measurement of nanometer-scale distances, enhancing the development and quality control of hard disk drives and other nanotechnology applications.
@article{2b711f41-9d3b-4fc1-b86b-57c82898e99b,
title={Calibration Method for Measurement of Li},
author={Corley W. Strunk and Paul J. Sides},
year={2026},
language={en}
}TY - JOUR TI - Calibration Method for Measurement of Li AU - Corley W. Strunk AU - Paul J. Sides PY - 2026 LA - en ER -
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