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Direct Observation of Monolayer MoS2 Pre

Yina Wang, Lei Zhang

2026enMoS2CVDin-situ spectroscopydifferential reflectance2D materialsTMDCs

Abstract

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The in-situ observation is of great significance to the study of the growth mechanism and controllability of two-dimensional transition metal dichalcogenides (TMDCs). Here, the differential reflectance spectroscopy (DRS) was performed to monitor the growth of molybdenum disulfide (MoS2) on a SiO2/Si substrate prepared by chemical vapor deposition (CVD). A home-built in-situ DRS setup was applied to monitor the growth of MoS2 in-situ. The formation and evolution of monolayer MoS2 are revealed by differential reflectance (DR) spectra. The morphology, vibration mode, absorption characteristics, and thickness of monolayer MoS2 have been confirmed by optical microscopy, Raman spectroscopy, ex-situ DR spectra, and atomic force microscopy (AFM) respectively. The results demonstrated that DRS was a powerful tool for in-situ observations and has great potential for the growth mechanism and controllability of TMDCs prepared by CVD. To the best of the authors’ knowledge, it was the first report in which the CVD growth of two-dimensional TMDCs has been investigated in-situ by reflectance spectroscopy.

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Cite This Work

@article{4fabdf21-6f14-467f-9445-4a2a2c25ba0a,
  title={Direct Observation of Monolayer MoS2 Pre},
  author={Yina Wang and Lei Zhang},
  year={2026},
  language={en}
}
TY  - JOUR
TI  - Direct Observation of Monolayer MoS2 Pre
AU  - Yina Wang
AU  - Lei Zhang
PY  - 2026
LA  - en
ER  -

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