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Morphological Structural and Chemical Pr

Raid A. Ismail, Nadir F. Habubi

2026enporous siliconelectrochemical etchingnanocrystalline filmssurface morphologyXRDAFM

Abstract

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In this paper, the nanocrystalline porous silicon (PS) films are prepared by electrochemical etching of p-type silicon wafer with current density (7 mA/cm2) and etching times on the formation nano-sized pore array with a dimension of around different etching time. The films were characterized by the measurement of XRD, FTIR spectroscopy and atomic force microscopy properties (AFM). We have estimated crystallite size from X-Ray diffraction about nanoscale for porous silicon and Atomic Force microscopy confirms the nanometric size. Chemical functionalization during the electrochemical etching shows on the surface chemical composition of PS. The etching possesses inhomogeneous microstructures that contain a-Si clusters (Si3–Si–H) dispersed in amorphous silica matrix. From the FTIR analyses showed that the Si dangling bonds of the as-prepared PS layer have large amount of Hydrogen to form weak Si–H bonds. The atomic force microscopy investigation shows the rough silicon surface, with increasing etching process (current density and etching time) porous structure nucleates which leads to an increase in the depth and width (diameter) of surface pits. Consequently, the surface roughness also increases.

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@article{d33bb78d-d346-48c0-a332-a877cab8249f,
  title={Morphological Structural and Chemical Pr},
  author={Raid A. Ismail and Nadir F. Habubi},
  year={2026},
  language={en}
}
TY  - JOUR
TI  - Morphological Structural and Chemical Pr
AU  - Raid A. Ismail
AU  - Nadir F. Habubi
PY  - 2026
LA  - en
ER  -

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