R. Coloma Ribera, R. W. E. van de Kruijs
A mixed 2D (film) and 3D (nano-column) growth of ruthenium oxide has been experimentally observed for thermally oxidized polycrystalline ruthenium thin films. In situ x-ray reflectivity upon annealing allowed the detection of 2D film growth as two separate layers consisting of low density and high density oxides. Nano-columns grow at the surface of the low density oxide layer, with the growth rate being limited by diffusion of ruthenium through the formed oxide film. Simultaneously, with the growth of the columns, sub-surface high density oxide continues to grow limited by diffusion of oxygen or ruthenium through the oxide film. This study provides insights into the growth mechanisms of ruthenium oxide films, which are vital for various applications, showcasing that both surface and sub-surface processes play crucial roles in their formation. The findings highlight the intricate interplay of growth dynamics in thin film technologies, which could influence the development of efficient catalytic materials.
@article{d900098c-4c99-4236-8f67-172086f198e1,
title={Surface and sub surface thermal oxidatio},
author={R. Coloma Ribera and R. W. E. van de Kruijs},
year={2026},
language={en}
}TY - JOUR TI - Surface and sub surface thermal oxidatio AU - R. Coloma Ribera AU - R. W. E. van de Kruijs PY - 2026 LA - en ER -
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