On the rate and uniformity of CdTe depos

This study investigates the rate and uniformity of cadmium telluride (CdTe) deposition in an impinging jet reactor using numerical simulations. The primary objective is to model the impinging jet with a parabolic inlet profile and to compare the results to existing analytical solutions. The methodology involved numerical simulations at various nozzle heights, specifically 0.5 radii and above, where results showed good agreement within 1% of the series solutions. However, discrepancies of several percent were noted at lower nozzle heights (below 0.375 radii), where the series solution's convergence was inadequate. Additional simulations that accounted for thermal gradients and realistic reactor details indicated that the experimentally derived mass-transfer-limited deposition profiles aligned with model results, provided that the model's bubbler outlet concentrations were adjusted downwards by a factor of four from saturation values. This adjustment was necessary given that the actual reactant mixtures at the bubbler outlets were not in saturation. These findings underscore the importance of accurate modeling in predicting deposition behaviors in chemical vapor deposition systems.